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The leading innovator of nanoscale
microscopy and metrology solutions

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FX40-AFM

Accelerate Your Research

Park FX40
NX-Wafer-AFM

Accurion i4

The ultimate stability and accuracy
solution for your scientific research

NX20-AFM

Park NX20

Accurate Large Sample AFM solution
for research and failure analysis

NX-Mask-AFM

Park NX-Mask

Repair your most challenging
photomask defects

NX-Wafer-AFM

Park NX-Wafer

Industry's leading automated AFM
for in-line metrology solutions

Emerging Trends of Nanotechnology

Read the Park systems' Technical Articles about AFM to understand recent developments

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AFM Experts provides you Online Courses, Webinar, Live Demos and Educational Videos from AFM Experts

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Park Systems aims to support the next generation of Trail Blazers in Nanoscience by encouraging young researchers to share and discuss their research

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  Q2 2014
  
 
 
 EVENTS

2014 International Conference on Nanoscience + Technology (ICN+T)
July 20th ~ 25th
Colorado, USA

58th 248th ACS National Meeting & Exposition
August 10th ~ 14th
San Francisco, USA

The Biophysical Society of Japan 2014
September 25th ~ 27th
Sapporo, Japan
 LATEST NEWS

• Park Presents NanoTechnology Advances Thru Innovative AFM Design

• Automatic Defect Review for Semiconductor Wafer

• Park European Users Meeting 2014

Enabling Nanoscale Advances
Featured Application: Automatic Defect Review for Semiconductor Wafers - An Astounding 1,000% Throughput Increase
The new 300mm bare wafer ADR provides a fully automated defect review process by AFM from transfer and alignment of defect maps to the survey and zoom-in scan imaging of defects that uses a unique remapping process that does not require any reference marker on a sample wafer. Unlike SEM which leaves destructive irradiation marks, square-shaped, on defect sites after its run, the new Park ADR AFM enables advanced coordinate translation with enhanced vision that uses the wafer edge and notch to automatically enable the linkage between a defect inspection tool and Park AFM. Since it is fully automated, it does not require any separate step to calibrate the stage of the targeted defect inspection system, increasing throughput by up to 1,000 percent. READ MORE
 
 Featured Product: Park NX-Wafer
Park Systems, a leading manufacturer of atomic force microscopy (AFM) products announces Park NX-Wafer, a revolutionary AFM design for bare wafer manufacturing that fully automates the automatic defect review process and increases production throughput by an astounding 1,000%. Park NX-Wafer produces sub-Angstrom roughness measurements for the flattest substrates and wafers with tip-to-tip variation of less than 2%, for the first time ever in the entire history of the semiconductor industry.
READ MORE
 Park Cover Story: Microscopy & Analysis
In this issue, Park Systems shows the world's first observation of rat tracheal tissue in an aqueous environment.

By using Park XE-Bio SICM, Professor Ushiki and his team from Niigata University have successfully imaged the hair-like cells of rat tracheal issue in liquid.READ MORE
New Park AFM
Website IS Now Ready
This website has an interactive, visitor-focused design. Many of the features of the new website were made in direct response to the requests received from customers around the world.
 
Visit Our New Website
 
 

Latest Park News

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Explore Park Products


A New Class of Atomic Force Microscope

Park FX40

Repair your most challenging photomask defects

NX-Mask

Thin film characterization imaging ellipsometer nanofilm

Accurion EP4

Compact benchtop isolation table in 3 sizes for versatile use

Accurion EP4

Experience our product's high-quality, precise, and long life backed by our worldwide service network. We are strongly committed to maintaining the quality of our products, making us a trustworthy choice for all your repair and maintenance needs.

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