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Nanoscale Solutions for Design and Manufacturing of Electronic Devices

This focused workshop series will provide an opportunity to Design, Process, Metrology, Yield and Failure Analysis Engineers to interface directly with Park Systems’ advanced applications experts and discuss day-to-day nanoscale solutions that address device manufacturing challenges.

 

Nanoscale Solutions for Design and Manufacturing of Electronic Devices – a digital workshop series

Register for the next workshopheld on September 24th


WHY PARK SYSTEMS ATOMIC FORCE MICROSCOPES

  • • Leader in Automated AFM Equipment
  • • Industry's sole non-destructive inspection and metrology technology, bundled in a single instrument
  • • Lower in-fab costs compared to individual inspection or metrology tools
  • • Fully-automated fleet matching tools enable day-to-day solutions for manufacturing yield challenges
  • • The choice of many of the top 20 Semiconductor Manufacturers
  • • Device Scaling and Novel Structure Designs
  • • Process Advancements to Enable High Volume Manufacturing Solutions
  • • Inspection and Metrology Methods to Capture Yield Excursion
  • • Packaging and Reliability Considerations


Q3CY20 Session: Nanoscale Solutions for Design and Manufacturing of Electronic Devices

Thursday, September 24, 2020
2 p.m. ET / 11 a.m. PT

Atomic scale AFM-based IR Hyperspectral Analysis for Advanced Manufacturing
Presented by Dr. Sung Park, Molecular Vista

Sung is the CEO of Molecular Vista, which he co-founded with Prof. Kumar Wickramasinghe (UC Irvine, formerly of IBM) in 2011 to provide research and industrial tools for rapid and nanoscale imaging with chemical identification. Sung has over 25 years of experience of industrial R&D, engineering, marketing and sales, and operations. He co-founded Park Scientific Instruments (PSI), which was one of the first commercial companies to develop and sell scanning tunneling microscopes (STM) and atomic force microscopes (AFM). Prior to founding Park Scientific Instruments, he worked as a post-doc at IBM Watson Research Center. Sung earned his Ph.D. in Applied Physics from Stanford University and BA in Physics from Pomona College.

Automated AFM tools for Metrology Applications in Semiconductor Manufacturing
Presented by Dr. Matthew Young, Park Systems

Matthew Young, PhD., is the manager of industrial technical services at Park Systems, Inc. In this role, he directs technical support and application development efforts for US-based customers in the LED, storage, and semiconductor industries. He will review how Park Systems automated AFMs are used to meet metrology needs for semiconductor manufacturers. Matt received his Ph.D. Degree in Chemical Engineering from Kansas State University.


Surface Roughness * Trench In-line AFM Introduction * Wafer Edge Metrology

In this digital user workshop series, Park Systems industrial support team will discuss resolving existing challenges while further pushing the envelope on performance and cost of ownership for Semiconductor Device Manufacturing.

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