Park NX-TSH Specifications
*This specification is customizable. Please consult with Park Systems for more information.
System
Specification
Sample size*
520 mm x 520 mm x 12 mm, 10 kg
Motorized X stage*
travels up to 625 mm, ± 3 µm resolution
Motorized Y stage*
travels up to 525 mm, ± 3 µm resolution
Motorized Z stage*
15 mm Z travel distance, 0.08 µm resolution, < 1 µm repeatability
Motorized Focus Stage*
9 mm Z travel distance for on-axis optics
COGNEX Pattern Recognition
pattern align resolution of 1/4 pixel
Scanner
Performances
XY Range
100 μm × 100 μm
XY Resolution
0.15 nm
Z Range
15 μm
Z Resolution
0.016 nm
AFM and XY Stage
Control Electronics
ADC
18 channels
4 high-speed ADC channels
24-bit ADCs for X,Y and Z position sensor
DAC
17 channels
2 high-speed DAC channels
20-bit DACs for X,Y and Z positioning
Compliances
CE
SEMI Standard S2/S8
Vibration, Acoustic Noise, and ESD Performances
Floor Vibration
< 0.5 µm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)
Acoustic Noise
>20 dB attenuation w/ Acoustic Enclosure
Facility Requirements
Room Temperature (Stand By)
10 °C ~ 40 °C
Room Temperature (Operating)
18 °C ~ 24 °C
Humidity
30% to 60% (not condensing)
Floor Vibration Level
VC-D (6µm/sec)
Acoustic Noise
Below 65 dB
Pneumatics
Vacuum : -80 kPa
CDA (or N2): 0.7 MPa
Power Supply Rating
208V - 240 V, single phase, 15 A (max)
Total Power Consumption
Consult Park Systems
Ground Resistance
Below 100 ohms
Options
Automatic Tip Exchange (ATX)
Automatic Tip Exchange performs fully automated tip exchanges in order to seamlessly continue automated measurement routines. It automatically calibrates cantilever location and optimizes measurement settings based on measurements of a reference pattern. Our novel magnetic approach to the tip exchange yields a 99% success rate, higher than the traditional vacuum techniques.
Ionization System
Ionization system effectively removes electrostatic charges. It ionizes the charged objects and is very reliable since the system always generates and maintains an ideal balance of positive and negative ions without causing any contamination to the surrounding area. It also reduces the accidental electrostatic built-in charge that may occur during sample handling.
Dimensions & Weight
NX-TSH
2334 mm(w) × 1450 mm(d) x 2450 mm(h), 2720 kg approx. (incl. Control Cabinet)
Ceiling Height: 2500 mm or more
Operator Working Space: 3700 mm (w) x 3000 mm (d), Minimum
