Sample Mounts
The sample mount allows you to place various types of sample for the AFM measurement. It provides easier means to fix and access the sample.
Multi Sample Chuck
- Sample plate to load multiple small samples for automated sequential scanning
- Up to 16 samples of less than 10 mm × 10 mm, 20 mm thickness each
- Sample weight: less than 200 g (in total)
150-mm Vacuum Sample Chuck
- Sample size: 2, 4, 6 inch wafers, and up to 10 × 10 mm of arbitrary shape, 20 mm thickness
- Sample weight: less than 500 g
Tilting Sample Chuck
- Sample plate to tilt the sample for sidewall measurements
- Tilting angle: 10, 15, and 20°
- Sample size: 20 mm × 20 mm, 2 mm thickness
- Sample weight: less than 200 g
Non-magnetic Sample Holder
- A sample holder to hold samples on top of the XY scanner using clips
- Recommended for magnetically sensitive samples and / or configuration
Snap-In Sample Chuck
- Sample chuck to place samples on a repeatable position
- Positioning repeatability: 5 µm in X and Y direction each
Cross-sectional Sample Holder
- Sample holder to vertically mount a cross-sectioned sample held by a metallic clip
- Allowable sample thickness: 3 mm max.