In this LIVE DEMO on the NX-Wafer Automated AFM we will introduce you to the inline metrology capabilities which are needed for full-automatic quality control.

As a follow up to the previous live demo on the NX20 large sample AFM, we will introduce you to the soft- and hardware additions in the world of automation to run the tool 24/7.
Features such as automatic wafer-handling and automatic tip exchange are necessary to control the tool completely remote. Automatic data acquisition and analysis of roughness, trench width, depth, and angle measurements are some of the most common applications, but only a fraction of the various analysis possibilities. With the #1 choice of AFM’s in the market you can be sure to find the perfect metrology solution for quantitative nano- to sub-nanoscale process inspection.

This LIVE DEMO will give you a solid overview of the high productivity and powerful features for inline wafer-fab metrology provided by NX-Wafer.

Presented By : 
Dr. Victor Bergmann, Application Director at Park Systems Europe, Mannheim, Germany
bergmann@parksystems.com

Victor Bergmann is the Technical Director at Park Systems Europe, where he is leading the team of application and service engineers. Before he joined Park Systems, he spent his PhD at the Max-Planck-Institute for Polymer Research in Mainz in the group of Hans-Jürgen Butt. His main research topic was studying different kinds of solar cells by means of Kelvin Probe Force Microscopy. Within the framework of the International Research Training Group 1404 he also spent half a year at Seoul National University using the AFM to characterize self-organizing nanostructures. As he just recently defended his thesis, he is now waiting for the corona shutdown to end to officially receive his doctoral degree.