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Interactive session will consist of demonstrating anodic oxidation and scratching on different samples. Lithography parameters will be explained with emphasis on drawing speed, humidity, and tip spring constant. Silicon wafer with nanoparticles and polycarbonate film will be used as demonstration samples. Questions are welcomed at any time during the session.

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Lecture #7: SCM
(Two-hour session)

Tuesday, September 21, 2021

  • 10:00 am – 12:00 am
    San Francisco, LA
  • 1:00 pm – 3:00 pm
    Boston, New York
  • 6:00 pm – 7:00 pm
  • 7:00 pm – 8:00 pm
    Paris, Rome

Join Park Systems' upcoming online lectures and explore Atomic Force Microscopy's working principles (AFM). The course will cover AFM operational principles through lectures and interactive demo sessions with live interaction from the attendees.

· Lecture: What is Scanning Capacitance Microscopy (SCM)?
We will engage in a lecture exploring the finer details of the configuration of Park’s SCM, the principle of SCM, the theory of the SCM measurement based on the capacitance-voltage curve of material, and the applications of SCM in the analysis of dopant profile in semiconductors using a Park Systems AFM. Q&A session will be followed after the lecture contents.

· Interactive Demo Session for SCM :
Lecture topics will be reinforced through demonstration Park Systems’ Scanning SCM mode on a Park Systems NX series AFM. A metal-oxide-semiconductor sample with different dopant type and dopant level will be used. AFM operator controls lock-in amplifier settings with emphasis on how to reveal dopant types and dopant level.

Presented By : 
Jiali Zhang, Ph.D, Technical Support Engineer, Park Systems

Jiali Zhang, Ph.D., is an engineer for Park Systems, where she focuses on the installation and support of AFM systems for Park’s research user base. She is also responsible for researching and writing technical papers and application notes for publication and presentation at scientific conferences. She received her Ph.D. in Analytical Chemistry from the University of California, Davis, and holds a B.S. in Applied Chemistry from Donghua University in Shanghai, China. Her expertise spans numerous microscopy techniques, and areas of study have also included biological systems and 3D printing technologies.




Park Lectures - Park Atomic Force Microscope