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MLCC PolyimideFilm MolybdenumDisulfide Ito Singapore SPMLabs LateralForceMicroscopy Epoxy Nanotechnology Crystal DOE PUR University_of_Regensburg TungstenDeposition sputter Sio2 CaMnO3 NtuEee dielectric_trench Yeditepe_University Hafnia Polarization Device temp Modulus NTU OpticalWaveguide Conductive AFM SurfaceOxidation NCM\ thermal_conductivity self_assembly ForceDistanceSpectroscopy Cobalt Ceramics