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  • Park
    HDM Series
    AFM Specifications

Park NX-HDM Specifications


Motorized XY stage

travels up to 150 mm × 150 mm, 2 µm repeatability

Motorized Z stage

25 mm Z travel distance
0.1 µm resolution, < 1 µm repeatability

Motorized Focus Stage

15 mm Z travel distance for on-axis optics

Sample Thickness Allowance

up to 20 mm

Full scan range Z run-out

< 2 nm

COGNEX Pattern Recognition

pattern align resolution of 1/4 pixel


Scanner Performances

XY Scanner Range

100 µm × 100 µm

XY Scanner Resolution

0.095 nm (20 bit position control)

Z Scanner Range

15 µm

Z Scanner Resolution

0.01 nm


AFM and XY Stage
Control Electronics


18 channels
4 high-speed ADC channels
24-bit ADCs for X,Y and Z scanner position sensor

Maximun Scan Size

4096 x 4096 pixels


17 channels
2 high-speed DAC channels
20-bit DACs for X,Y and Z scanner positioning


Vibration, Acoustic Noise, and ESD Performances

Floor Vibration

< 0.5 µm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)

Acoustic Noise

>20 dB attenuation w/ Acoustic Enclosure


Facility Requirements

Room Temperature (Stand By)

10 °C ~ 40 °C

Room Temperature (Operating)

18 °C ~ 24 °C


30% to 60% (not condensing)

Floor Vibration Level

VC-E (3 µm/sec)

Acoustic Noise

Below 65 dB


Vacuum : -60 kPa

Power Supply Rating

100/120 V/ 208~240 V, single phase, 15 A (max)

Total Power Consumption

2 KW (typical)

Ground Resistance

Below 100 ohms



Ionization System

Ionization system effectively removes electrostatic charges. It ionizes the charged objects and is very reliable since the system always generates and maintains an ideal balance of positive and negative ions without causing any contamination to the surrounding area. It also reduces the accidental electrostatic built-in charge that may occur during sample handling.


Dimensions in mm
& Weight in kg

Acoustic Enclosure

880 (w) × 980 (d) × 1460 (h)
620 kg approx. (incl. basic NX-HDM System)

Control Cabinet

600 (w) × 900 (d) × 1600 (h)
170 kg approx. (incl. controllers)

System Floor Space

1720 (w) × 920 (d)

Ceiling Height

2000 or more

Operator Working Space

2400 (w) × 2450 (d), minimum (dimension unit: mm)

demensions[ Park NX-HDM system dimension ] / [ Park NX-HDM installation layout ]

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