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    NX-TSH
    AFM Specifications
 

Park NX-TSH Specifications

*This specification is customizable. Please consult Park Systems for more information.



System
Specification

Sample size*

520 mm x 520 mm x 10 mm, 10 kg

Motorized X stage*

travels up to 625 mm, ± 3 µm resolution

Motorized Y stage*

travels up to 525 mm, ± 3 µm resolution

Motorized Z stage*

25 mm Z travel distance, 0.08 µm resolution, < 1 µm repeatability

Motorized Focus Stage*

9 mm Z travel distance for on-axis optics


COGNEX Pattern Recognition

pattern align resolution of 1/4 pixel

 

Scanner
Performances

XY Range

100 μm × 100 μm


XY Resolution

0.15 nm

Z Range

15 μm

Z Resolution

0.016 nm

 

AFM and XY Stage
Control Electronics

ADC

18 channels
4 high-speed ADC channels
24-bit ADCs for X,Y and Z position sensor

 

DAC

12 channels
2 high-speed DAC channels
20-bit DACs for X,Y and Z positioning

 

Compliances

CE

SEMI Standard S2/S8

 

Facility Requirements

Room Temperature (Stand By)

10 °C ~ 40 °C 


Room Temperature (Operating)

18 °C ~ 24 °C


Humidity

30% to 60% (not condensing)


Floor Vibration Level

VC-E (3 µm/sec)


Acoustic Noise

Below 65 dB

Pneumatics

Vacuum : -80 kPa
CDA (or N2): 0.7 MPa


Power Supply Rating

208V - 240 V, single phase, 17 A (max)


Total Power Consumption

Consult Park Systems


Ground Resistance

Below 100 ohms

 

 

Park NX-TSH - Specifications | Park Atomic Force Microscope