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    NX-TSH
    AFM Specifications
 

Park NX-TSH Specifications

*This specification is customizable. Please consult Park Systems for more information.



System
Specification

Sample size*

520 mm x 520 mm x 12 mm, 10 kg

Motorized X stage*

travels up to 625 mm, ± 3 µm resolution

Motorized Y stage*

travels up to 525 mm, ± 3 µm resolution

Motorized Z stage*

25 mm Z travel distance, 0.08 µm resolution, < 1 µm repeatability

Motorized Focus Stage*

9 mm Z travel distance for on-axis optics


COGNEX Pattern Recognition

pattern align resolution of 1/4 pixel

 

Scanner
Performances

XY Range

100 μm × 100 μm


XY Resolution

0.15 nm

Z Range

15 μm

Z Resolution

0.016 nm

 

AFM and XY Stage
Control Electronics

ADC

18 channels
4 high-speed ADC channels
24-bit ADCs for X,Y and Z position sensor

 

DAC

17 channels
2 high-speed DAC channels
20-bit DACs for X,Y and Z positioning

 

Compliances

CE

SEMI Standard S2/S8

 

Vibration, Acoustic Noise, and ESD Performances

Floor Vibration

< 0.5 µm/s (10 Hz to 200 Hz w/ Active Vibration Isolation System)

Acoustic Noise

>20 dB attenuation w/ Acoustic Enclosure

 

Facility Requirements

Room Temperature (Stand By)

10 °C ~ 40 °C 


Room Temperature (Operating)

18 °C ~ 24 °C


Humidity

30% to 60% (not condensing)


Floor Vibration Level

VC-E (3 µm/sec)


Acoustic Noise

Below 65 dB

Pneumatics

Vacuum : -80 kPa
CDA (or N2): 0.7 MPa


Power Supply Rating

208V - 240 V, single phase, 15 A (max)


Total Power Consumption

Consult Park Systems


Ground Resistance

Below 100 ohms

 

Options

Automatic Tip Exchange (ATX)

Automatic Tip Exchange performs fully automated tip exchanges in order to seamlessly continue automated measurement routines. It automatically calibrates cantilever location and optimizes measurement settings based on measurements of a reference pattern. Our novel magnetic approach to the tip exchange yields a 99% success rate, higher than the traditional vacuum techniques.

 

Ionization System

Ionization system effectively removes electrostatic charges. It ionizes the charged objects and is very reliable since the system always generates and maintains an ideal balance of positive and negative ions without causing any contamination to the surrounding area. It also reduces the accidental electrostatic built-in charge that may occur during sample handling.

 

Dimensions & Weight

NX-TSH

2334 mm(w) × 1450 mm(d) x 2450 mm(h), 2720 kg approx. (incl. Control Cabinet)
Ceiling Height: 2500 mm or more
Operator Working Space: 3700 mm (w) x 3000 mm (d), Minimum

 

 

 

 

Park NX-TSH - Specifications | Park Atomic Force Microscope