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    XE15
    AFM Specifications

Park XE15 Specifications

Scanner

Z scanner
Flexure guided high-force scanner
Scan range: 12 μm (optional 25 μm)

XY scanner
Single module flexure XY-scanner with closed-loop control
Scan range: 100 μm × 100 μm

 

Stage

Motorized XY stage travel range:
150 mm (200 mm optional), optional precision encoders for better XY stage repeatability

Motorized Z stage travel range:
27.5 mm, optional precision encoder for better stage repeatability

Motorized Focus travel range:
20 mm, optional precision encoder for stage repeatability

 

Vision

Direct on-axis vision of sample surface and cantilever
Field-of-view: 480 μm × 360 μm (with 10× objective lens)
CCD: 1.2 M pixel (default), 5 M pixel (optional; Field-of-view: 840 μm x 630 μm)

 

Sample Mount

Sample size
10 mm x 10 mm, 20 thickness (Default Multi Sample Chuck)
Up to 150 mm wafer sample (Optional 150 mm Vacuum Sample Chuck)
Up to 200 mm wafer sample (Optional 200 mm Vacuum Sample Chuck)

 

Electronics

Signal processing
ADC: 20 channels
16-bit ADCs for X, Y, and Z scanner position sensor
DAC: 21 channels
16-bit DACs for X, Y, and Z scanner positioning

Integrated functions
Active Q control (optional)
Cantilever spring constant calibration (optional)
Signal Access Module (optional)

 

Options/Modes

Electrical Properties

Conductive AFM (C-AFM)
I/V Spectroscopy
Kelvin Probe Force Microscopy (KPFM)
KPFM with High Voltage
Scanning Capacitance Microscopy (SCM)
Scanning Spreading-Resistance Microscopy (SSRM)
Scanning Tunneling Microscopy (STM)
Photo Current Mapping (PCM)
Electrostatic Force Microscopy (EFM)

Topography Imaging

Non-Contact
Contact
Tapping

Magnetic Properties

Magnetic Force Microscopy (MFM)

Dielectric/Piezoelectric Properties

Piezoresponse Force Microscopy (PFM)
PFM with High Voltage
Piezoresponse Spectroscopy

Mechanical Properties

Force Modulation Microscopy (FMM)
Nanoindentation
Nanolithography
Nanolithography with High Voltage
Nanomanipulation
Lateral Force Microscopy (LFM)
Force Distance (F/d) Spectroscopy
Force Volume Imaging

Thermal Properties

Scanning Thermal Microscopy (SThM)

Chemical Properties

Chemical Force Microscopy with Functionalized Tip
EC-AFM

 

Software

Park SmartScan™

AFM system control and data acquisition software
Auto mode for quick setup and easy imaging
Manual mode for advanced use and finer scan control

XEI

AFM data analysis software
Stand-alone design—can install and analyze data away from AFM
Capable of producing 3D renders of acquired data

 

Accessories

Electrochemistry Cell
Universal Liquid Cell with Temperature Control
Temperature Controlled Stages
Magnetic Field Generator

 

Park XE15 - Specifications | Park Atomic Force Microscope