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    AFM Specifications

Park XE15 Specifications


Z Scanner

Guided high-force flexure scanner

Scan range : 12 µm (optional 25 µm)
Height noise level: 50 pm
(RMS, at 0.5 kHz bandwidth)

XY Scanner

Single module flexure XY-scanner with closed-loop control

Scan range : 100 µm × 100 µm



Z stage range : 25 mm (Motorized)
Focus travel range : 20 mm (Motorized)
Optional precision encoders for repeatable XY positioning
XY stage travel range : 150 mm x 150 mm (Motorized)


Sample Mount

Sample size : Open space up to 150 mm x 150 mm, thickness up to 20 mm (optional 200 mm)
Sample weight : < 500 g



10x (0.28 NA) ultra-long working distance lens (1 µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 480 × 360 µm (with 10× objective lens)
CCD : 1 M pixel, 5 M pixel (optional)




Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs (optional)


AFM data analysis software (running on Windows, MacOS X, and Linux)



High performance DSP : 600 MHz with 4800 MIPS
Maximum 16 data images
Maximum data size : 4096 × 4096 pixels
Signal inputs : 20 channels of 16 bit ADC at 500 kHz samplings
Signal outputs : 21 channels of 16 bit DAC at 500 kHz settling
Synchronous signal : End-of-image, end-of-line, and end-of-pixel TTL signals
Active Q control (optional)
Cantilever spring constant calibration (optional)
CE Compliant
Power : 120 W
Signal Access Module (Optional)


AFM Modes
(*Optionally available)

Standard Imaging

True Non-Contact AFM
Basic Contact AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Tapping AFM

Force Measurement*

Force Distance (F/d) Spectroscopy
Force Volume Imaging

Dielectric/Piezoelectric Properties*

Electric Force Microscopy (EFM)
Dynamic Contact EFM (EFM-DC)
Piezoresponse Force Microscopy (PFM)
PFM with High Voltage

Mechanical Properties*

Force Modulation Microscopy (FMM)
Nanolithography with High Voltage

Magnetic Properties*

Magnetic Force Microscopy (MFM)


Electrical Properties*

Conductive AFM (C-AFM)
IV Spectroscopy
Kelvin Probe Force Microscopy (KPFM)
KPFM with High Voltage
Scanning Capacitance Microscopy (SCM)
Scanning Spreading-Resistance Microscopy (SSRM)
Scanning Tunneling Microscopy (STM)
Photo Current Mapping (PCM)

Chemical Properties*

Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-AFM)


AFM Options

Temperature Control

Temperature Controlled Stage 1
  -25 °C to +170 °C
Temperature Controlled Stage 2
  Ambient to +250 °C
Temperature Controlled Stage 3
  Ambient to +600 °C

Liquid Cells

Universal Liquid Cell
Open or closed liquid cell with liquid/gas perfusion
Temperature control range: 0 °C to +110 °C (in air), 4 °C to +70 °C (with liquid)
Electrochemistry Cell

Liquid Probehand

Designed for imaging in general liquid environment
Resistant to most buffer solutions including acid
Contact and Non-contact AFM imaging in liquid

Encoders for Motorized Stage

• The encoded XY stage travels in 1 µm resolution with 2 µm repeatability
• The encoded Z stage travels in 0.1 µm resolution with 1 µm repeatability


Dimensions in mm

xe15 demensions

Park XE15 - Specifications | Park Atomic Force Microscope