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    XE7
    AFM Specifications

Park XE7 Specifications

Scanner

Z scanner
Flexure guided high-force scanner
Scan range: 12 μm (optional 25 μm)

XY scanner
Single module flexure XY-scanner with closed-loop control
Scan range: 50 μm × 50 μm (optional 10 μm × 10 μm or 100 μm × 100 μm)

 

Stage

XY stage travel range:
13 mm x 13 mm
Z stage travel range:29.5 mm

 

Vision

Direct on-axis vision of sample surface and cantilever
Field-of-view: 480 μm × 360 μm (with 10× objective lens)
CCD: 1.2 M pixel (default), 5 M pixel (optional; Field-of-view: 840 μm x 630 μm)

 

Sample Mount

Sample size: Up to 100 mm
Thickness: Up to 20 mm

 

Electronics

Signal processing

ADC: 20 channels
16-bit ADCs for X, Y, and Z scanner position sensor

DAC: 21 channels
16-bit DACs for X, Y, and Z scanner positioning

Integrated functions

Active Q control (optional)
Cantilever spring constant calibration (optional)
Signal Access Module (optional)

 

Options/Modes

Topography Imaging

Non-Contact
Contact
Tapping

Magnetic Properties

Magnetic Force Microscopy (MFM)
Tunable Magnetic Field MFM

Electrical Properties

Conductive AFM (C-AFM)
I/V Spectroscopy
Kelvin Probe Force Microscopy (KPFM)
KPFM with High Voltage
Scanning Capacitance Microscopy (SCM)
Scanning Spreading-Resistance Microscopy (SSRM)
Scanning Tunneling Microscopy (STM)
Photo Current Mapping (PCM)
Electrostatic Force Microscopy (EFM)

Thermal Properties

Scanning Thermal Microscopy (SThM)

Dielectric/Piezoelectric Properties

Piezoresponse Force Microscopy (PFM)
PFM with High Voltage
Piezoresponse Spectroscopy

Mechanical Properties

Force Modulation Microscopy (FMM)
Nanoindentation
Nanolithography
Nanolithography with High Voltage
Nanomanipulation
Lateral Force Microscopy (LFM)
Force Distance (F/d) Spectroscopy
Force Volume Imaging

Chemical Properties

Chemical Force Microscopy wit h Functionalized Tip
EC-AFM

 

Software

Park SmartScan™

AFM system control and data acquisition software
Auto mode for quick setup and easy imaging
Manual mode for advanced use and finer scan control

XEI

AFM data analysis software
Stand-alone design—can install and analyze data away from AFM
Capable of producing 3D renders of acquired data

 

Accessories

Electrochemistry Cell
Universal Liquid Cell with Temperature Control
Temperature Controlled Stages
Glove Box
Magnetic Field Generator

 

Park XE7 - Specifications | Park Atomic Force Microscope