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Park NX20

The Leading Nanometrology Tool for Failure Analysis

Park NX20 is the go-to solution for failure analysis and semiconductor metrology. It offers accurate, precise, and reproducible measurements, featuring a non-contact mode for preserving tip sharpness, fast defect imaging, and a decoupled XY scanning system for 3D measurements. The low-noise Z detector ensures precise topography measurements without errors during high-speed scanning. With capabilities for surface roughness measurements, defect review imaging, high-resolution electrical scans, and sidewall measurements, Park NX20 excels in tackling intricate semiconductor challenges and large-sample research.

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Defect Review Imaging and Analysis for Large Sample

Park NX20 is equipped with unique features that make it easier to uncover the reasons behind device failure and develop more creative solutions. Its unparalleled precision provides high resolution data that lets you focus on your work, while its True Non-Contact™ mode scan keeps tips sharper and longer. Park NX20 has one of the most user friendly designs and automated interfaces in the industry, so you won’t have to spend as much time and energy using the tool and supervising junior engineers with the system. This lets you focus your experience on solving bigger problems and providing insightful and timely failure analysis to your customers.

  • Sidewall measurements for 3D structure study

    The NX20’s innovative architecture lets you detect the sidewall and surface of the sample, and measure their angle. This gives the unit the versatility you need to do more innovative research and gain deeper insights.

    Sidewall measurements for 3D structure study

  • Surface Roughness Measurements for Media and Substrates

    Surface roughness is one of the key applications where Park NX20 can excel and deliver the accurate failure analysis and quality assurance.

    Surface Roughness Measurements for Media and Substrates

  • High Resolution Electrical Scan Mode

    QuickStep SCM: The Fastest Scanning Capacitance Microscopy. PinPoint AFM: The Frictionless Conductive AFM.

    High Resolution Electrical Scan Mode

  • Reproduce Best AFM Measurement

    True Non-Contact Mode preserves the sharp tip end even after imaging 200 images of CrN, so called tip check sample. CrN has very abrasive surface that may quickly wear out the sharp tip.

    Reproduce Best AFM Measurement

  • True Sample Topography™ without Piezo Creep Error

    Our AFMs are equipped with the most effective low noise Z detectors in the field, with a noise of .02 nm over large bandwidth. This produces highly accurate sample topography, no edge overshoot and no need for calibration. Just one of the many ways Park AFM saves your time and gives you better data.

    True Sample Topography™ without Piezo Creep Error

2D Flexure-Guided Scanner with 100µm x 100µm Scan Range

The XY scanner consists of symmetrical 2-dimensional flexure and high-force piezoelectric stacks provides high orthogonal movement with minimal out-of-plane motion as well as high responsiveness essential for precise sample scanning in the nanometer scale.

2D Flexure-Guided Scanner with 100µm x 100µm Scan Range

High Speed Z Scanner with 15µm Scan Range

Driven by a high-force piezoelectric stack and guided by a flexure structure, the standard Z scanner has a resonant frequency of 9 kHz. The maximum Z scan range can be extended from 15µm to 30µm with the optional long scan range Z scanner.

High Speed Z Scanner with 15µm Scan Range

Low Noise XYZ Position Sensors

The industry leading low noise Z detector replaces the applied Z voltage as the topography signal. In addition, the low noise XY closed loop scan minimizes the forward and backward scan gap to be less than 0.15% of the scan range.

Low Noise XYZ Position Sensors

Motorized XY Sample Stage with Optional Encoders

The encoders, used on all motorized stages, enable higher positioning repeatability for accurate sample positioning. The encoded XY stage travels in 1 µm resolution with 2 µm repeatability, and the encoded Z stage, in 0.1 μm resolution with 1 μm repeatability.

Motorized XY Sample Stage with Optional Encoders

Step Scan Automation

Using the motorized sample stage, Step-and-Scan enables user-programmable multiple region imaging. This automated feature increases productivity by minimizing user assistance during repetitive imaging processes.

Step-and-Scan process consists of:

  • Scan an image
  • Lift the cantilever
  • Move the motorized stage to a user defined coordinate
  • Approach
  • Repeat the scan

Accessible Sample Holder

The unique head design allows for an open side access to sample and tip. The maximum sample size one can place on the stage is either 150 mm diameter x 20 mm or 200 mm diameter x 20 mm depending on the travel range option chosen for the XY sample stage.

Accessible Sample Holder

Auto Engage by Slide-to-Connect SLD Head

The AFM head quickly slides into place along a dovetail rail, automatically locking and connecting to control electronics with precise positioning. The Super Luminescence Diode (SLD) provides accurate imaging of reflective surfaces and enables precise pico-Newton force-distance measurements, without interference in visible spectrum experiments.

Auto Engage by Slide-to-Connect SLD Head

Direct On-Axis High Powered Optics with Integrated LED Illumination

Custom designed objective lens with a 51 mm ultra long working distance and 0.21 NA offers 1.0 µm resolution and sharp on-axis optical views. The top-down direct view enables easy navigation to target areas. The EL20x objective lens features a 20 mm working distance, 0.42 NA, and 0.7 µm resolution for enhanced vision clarity. A larger CCD sensor and software-controlled LED light ensure a broad field of view and ample illumination for precise sample observation.

Direct On-Axis High Powered Optics with Integrated LED Illumination

Expansion Slot for Advanced SPM Modes and Options

Advanced SPM modes are enabled by simply plugging an option module to the expansion slot. The modular design of the NX-series AFM allows option compatibility throughout its product line.

Expansion Slot for Advanced SPM Modes and Options

Vertically Aligned Motorized Z Stage and Focus Stage

The Z stage and focus stage engage the cantilever with the sample surface while constantly maintaining a clear field of vision for the user. And because the focus stage is motorized and software controlled, it has the precision necessary for transparent samples and liquid cell applications.

Vertically Aligned Motorized Z Stage and Focus Stage

High Speed 24-bit Digital Electronics

The NX-series AFMs utilize a unified NX electronics controller, a 24-bit high-speed digital unit that enhances the accuracy and speed of Park’s True Non-Contact ModeTM. Its low noise and fast processing are perfect for nanoscale imaging and precise electrical measurements, while embedded digital signal processing enhances functionality and value for advanced research.

High Speed 24-bit Digital Electronics
  • 24-bit signal resolution for XY and Z detectors
  • Embedded digital signal processing capability
  • Intergrated signal access ports

Applications

Perfect for Diverse Applications