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Wang OpticalElement Mechanical Switching FM_SKPM ForceVolume lithography SiWafer PolymerPatterns AM-KPFM Carbon Calcium Pinpoint PFM Blend Glass HOPG Galfenol Growing TPU PatternedSapphireSubstrat Strontium Tapping Wonseok PANI aluminum_nitride SKPM CeramicCapacitor DeflectionOptics ElectroChemical Hexylthiophene Gold LiftHeight Polyurethane TungstenDeposition Hafnium_dioxide