Super-junction MOSFET
A Super-junction MOSFET was measured in Microwave Impedance Microscopy (MIM) mode to acquire surface capacitance. The image shows the Capacitance difference of the Super-junction MOSFET.
Scanning Conditions
- System: Park FX40
- Scan Mode: Microwave Impedance Microscopy (Channel: Capacitance)
- Scan Rate: 0.3 Hz
- Scan Size: 50 µm × 15 µm, 15 µm × 10 µm
- Pixel Size: 512 × 256 pixels
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