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Wafer Processing
Park AFM wafer systems play a crucial role in precise nanoscale measurement and control for wafer fabrication, ensuring accurate construction of devices
![](/etc.clientlibs/parksystems/clientlibs/clientlib-site/resources/images/img-metrolog_002.png)
Photomask Repair
Park AFM for photomask repair offers a comprehensive solution that streamlines the entire process from automatic defect review to the repair and subsequent verification of the fixes, significantly enhancing repair efficiency and throughput
![](/etc.clientlibs/parksystems/clientlibs/clientlib-site/resources/images/img-metrolog_003.png)
Advanced Packaging Optical Profilometry
Park AFM's pioneering integration of White Light Interferometry (WLI) enhances quality assurance and process control across all semiconductor manufacturing stages, including advanced packaging and R&D metrology
![](/etc.clientlibs/parksystems/clientlibs/clientlib-site/resources/images/img-metrolog_004.png)
Flat Panel Display
For flat panel display manufacturing, including OLED, LCD, and photonics, Park AFM offers a highly accurate and non-destructive measurement method, optimized for large sample analysis exceeding 300 mm