Park FX Large Sample AFMs

Park FX Large Sample AFM Series is designed for high-precision and versatile surface characterization, ideal for both research and industrial settings. Supporting samples from small size up to 300 mm wafers, it is the ultimate solution for semiconductor manufacturing, materials research, quality assurance, and a range of other nanoscale applications including chemical analysis at nanoscale..

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  • High-Precision & Versatile Performance

    ‧ Advanced mechanical structure ensuring minimal thermal drift and great stability
    ‧ Wide sample capacity supporting from small sizes to 300 mm wafers
    ‧ Supports advanced nano-IR spectroscopy (PiFM) for precise chemical analysis

    High-Precision & Versatile Performance

  • Simplified Workflow with Automated Features

    ‧ Automatic Probe Exchange with 16 probe slots enhancing efficiency with multiple experiments in one setup
    ‧ Streamlines setup with automated tip mounting and laser beam alignment
    ‧ StepScanᵀᴹ feature for automated sequential measurements at multiple coordinates
    ‧ Macro optics for a large field of view (FOV), covering an entire 200 mm wafer sample

    Simplified Workflow with Automated Features

  • Specialized Features for Industrial AFM Applications

    ‧ Specialized industrial R&D applications with long-range surface roughness profiling, recipe-based routine measurements and a rotatable stage
    ‧ Improved sample visualization with optional advanced off-axis optical configurations
    ‧ Integrated industrial-grade facility featuring a signal tower with an emergency-off unit, a facility controller, and optional contamination control solutions using a fan filter unit

    Specialized Features for Industrial AFM Applications
FX40 with monitor

Park nano-IR Spectroscopy

Advanced nano-IR Spectroscopy for Large Sample Chemical Analysis

Park nano-IR is an integrated infrared (IR) spectroscopy and atomic force microscopy (AFM) system. The spectroscopy part provides chemical identification under 10 nm spatial resolution. It uses a non-contact technique offering the safest spectroscopy scanning and the best in industry spatial resolution. The microscopy part provides nanometer 3D topography with sub-angstrom height accuracy and mechanical property information to the user.

FX40 with monitor

Unlock the FX200 Advantage

Discover how automated features are transforming AFM workflows

The FX200 is the latest large-sample Atomic Force Microscope (AFM) designed to enhance nanoscale surface analysis with advanced automation. This technical note provides a detailed overview of its key features, automation capabilities, improved sample navigation, StepScan technology, and experimental management system.

Applications

Perfect for Diverse Applications