This technical note introduces the FX200, Park Systems' latest large-sample AFM, designed to address both fundamental and advanced research needs. The FX200 is compatible with a wide range of sample types and sizes, delivering an optimized solution for academic and industrial researchers pursuing cutting-edge discovery and innovation Please also refer to the FX200 introduction video available at: https://www.youtube.com/watch?v=v6x0NDAJpjo.
Introduction
Atomic Force Microscopy (AFM) has become an indispensable tool in nanoscale surface characterization due to its exceptional spatial resolution, non-destructive nature, and versatility across a wide range of materials. It is extensively employed in fields such as materials science, semiconductor research, and polymer analysis, offering critical insights into surface morphology, mechanical properties, and functional characteristics at the nanometer scale. However, despite its advantages, conventional AFM operation presents significant challenges, primarily due to the need for manual intervention in key processes such as probe exchange, cantilever detection, laser beam alignment, and parameter optimization. These steps require a high level of expertise and a significant amount of time to be performed skillfully, often resulting in inconsistencies in measurement reliability and limiting throughput in high-demand research environments.
Overcoming the operational barriers is essential for the continuous evolution of AFM technology. The future of AFM also lies in the development of advanced automation capabilities that simplify workflows without compromising accuracy. Researchers should be able to acquire high-quality, reproducible data with minimal manual effort, enabling them to focus on data analysis rather than complex setup procedures.
Park Systems' FX product-line embodies such vision by integrating state-of-the-art automation, enabling fully automated probe exchange, real-time cantilever detection, and intelligent laser beam alignment. By drastically reducing user intervention and potential sources of error, the FX series enhances measurement efficiency and reliability, paving the way for a new era of user-friendly, high-performance AFM systems that allow users to focus solely on their research.
The FX200 inherits these advantages while providing an ideal solution for large-scale wafer-level measurements. Equipped with a Macro Optics, an off-axis sample view camera, it allows researchers to capture a comprehensive image of the entire sample at a glance, enabling precise selection of measurement locations with ease. Additionally, advanced features such as StepScan™, programmable recipe-based measurement, further enhance the automation capabilities of the FX series. These functions allow researchers to define measurement positions, set specific parameters, and configure repeated scans according to their experimental needs, significantly improving workflow efficiency and reproducibility. By seamlessly integrating automation with user control, the FX200 sets a new standard for high-throughput, precision AFM measurements, ranging from small-sized samples to 200-mm wafer analysis.
One of Park Systems’ favorite user quotes is, "If AFM had been known to be this easy, it would have been used much more often in most of my samples." While supporting users of the FX product line-up, we soon recognized a greater need: to provide researchers with comprehensive record-keeping and experimental archiving capabilities that not only save time when collecting scientific results but also ensure a reliable, error-free digital laboratory bookkeeping system. Here is how these needs have been addressed.
Overview of FX200
The FX200 is Park Systems’ newest large sample AFM. It is designed to optimize cutting-edge research with advanced automation features, support for diverse sample size and types, and improved performance. (Figure 1). What sets FX200 apart from other large-sample AFMs on the market is its accessibility to both AFM experts and non-experts, delivering high-quality results. Achieving the highest precision without sacrificing speed, the FX200 balances performance effectively. Its ease-of-use stems from decades of experience in designing automation and user-friendly software for industrial in-line inspection AFMs. The FX200 provides a capable platform to measure samples varying in size from a centimeter up to full 200 mm wafers. The sample surface can be checked and navigated intuitively using optical microscopy. Desired positions can be saved with just a few clicks, allowing repeat measurements in the same or multiple locations.
Figure 1. The full shot of FX200. The AFM system is located in an acoustic enclosure to minimize various noises.
Key features 1. Effortless Setup: AFM probe handling and beam alignment
A key feature of the FX series is its automatic probe reading and exchange, along with automatic beam alignment. These functions significantly streamline the preparatory work that has traditionally made AFM measurements challenging. With just a few clicks, researchers can overcome these barriers, making AFM measurements more accessible even to those new to the technique.
The FX200 can accommodate up to 16 AFM probes, providing outstanding support for long-term measurements of large samples.
Each probe is recognized via a QR code, allowing users to check the loaded probe types at a glance. When the researcher selects a desired AFM probe, the FX200 automatically picks it up, verifies the cantilever position, aligns the laser beam, and completes the frequency sweep—all with minimal user input.
Beyond convenience, the FX200 also offers significant cost and time savings through its automated tip exchange method. The risk of expensive probes being damaged by researchers unfamiliar with their operation is eliminated, thereby reducing unnecessary consumable costs. Additionally, the training and practice time required for new users is greatly reduced, as the system eliminates the difficulty of manually mounting a probe. Traditional AFM setup steps, such as manual laser/cantilever positioning and PSPD alignment, can be particularly time-consuming—especially for inexperienced users. By automating these processes, the FX200 not only enhances efficiency and reproducibility but also lowers the barrier to entry for AFM measurements, making high-precision nanoscale analysis more accessible than ever.
Key features 2. Improved sample navigation optics with large field-of-view camera
The FX200's sample chuck, which can accommodate from less than the coupon-sized samples to 200 mm wafer, combined with the large field-of-view camera makes region of interest identification quick and easy.
As shown in Figure 2, SmartScan™ – Park Systems' AFM operating software – provides a comprehensive view of the sample's entire structure. To achieve this, follow these steps: 1) Use Marker to check the approximate measurement location, and 2) Use the mouse scroll to select the exact position for measurement. In this case, the enhanced optical vision of the FX series can be checked up to 0.87 μm line width, providing an improved measurement experience. 3) The positions added by the researcher for multiple measurements are also recorded as coordinates.
Figure 2. Macro optics for full 200 mm sample view.
The multi-sample chuck, which can load up to 16 coupon-sized samples, enables comparative measurement by uploading samples of various conditions at once. Combined with the FX200's automatic probe exchange function, this feature simplifies the measurement process for researchers. In addition, each sample is securely attached to the sample chuck under vacuum conditions, thereby minimizing potential damage.
Key features 3. StepScan: How is automation utilized in AFM?
The automation features of the FX200 are key to improving the user experience by optimizing the ease of use. StepScan allows for easy automation of repetitive measurements for both research and industrial applications .With StepScan, multiple positions can be operated under the same measurement condition or under different conditions. If researchers set and run measurement positions and parameters as shown in Figure 3, multiple positions can be measured repeatedly while exchanging the AFM probe, as demonstrated in Figure 4.
Figure 3. Captured SmartScanTM for StepScan and its parameters.
Automatic sequential measurements at multiple predefined coordinates are possible by StepScan.
Figure 4. Repeated AFM results of each wafer position. Using StepScan, the center, bottom, and top positions of a 200 mm wafer are measured sequentially; following an AFM probe exchange, the process is repeated.
Feature position across the wafer shows repeatability of ±2 μm.
Key features 4. From large to small
User-friendliness and ease of use are important, but the core of AFM lies in delivering accurate results and superior performance.
The FX200 excels in performance by accurately capturing the wafer's surface structure across a wide range of scales—from a full-scale view of 100 μm × 100 μm down to nanoscale details. Figure 5 demonstrates the capability to gradually magnify the surface from the overall shape of the graphene flake layer to its detailed structure. Additionally, the moiré pattern in the twisted bilayer graphene is clearly imaged at scan sizes of 100 nm×100 nm or less.
Figure 5. AFM results from 100 μm×100 μm to 30 nm×30 nm scan size. It covers a wide range of scan sizes from the entire structure of graphene flake to the moiré pattern of twisted bilayer graphene
While the FX200 is designed for large samples, researchers often need to examine very small features. To address this need, the FX200 captures nanoscale structures within a small scan area while maintaining the integrity of complex structures in larger scan areas, as shown in Figure 6.
Figure 6. AFM results of Si wafer. It is possible to accurately measure the complex structure of Si wafer or the tiny and narrow trench structure.
Key features 5. Equipment management
FX200 is designed for use in various fields such as academic and industrial labs, shared user facilities, etc. To this end, the FX200 is designed for a wide range of users- including academic and industrial labs as well as shared user facilities—ensuring consistent performance and safety. In the FX200 system, real-time environmental conditions are continuously monitored by a temperature and
humidity sensor positioned near the AFM head. The recorded values are displayed as a plot chart, as shown in Figure 7. Also, if it is out of the specified range (Temperature range: 18°C to 40°C / Humidity range: 30% to 60%), an alert pop-up appears.
Emphasizing ease of use, the FX200 introduces a more efficient approach, eliminating the need for researchers to frequently open and close the AE to check the AFM system. Recognizing the limitations of manual inspection, the FX200 incorporates a live monitoring camera inside the AE, allowing real-time observation of both the AFM system and the internal conditions of the enclosure during
measurements (Figure 8). This feature enables researchers to monitor system status without disrupting the experimental environment, ensuring continuous operation while enhancing convenience and reliability in high-precision AFM experiments.
Figure 7. Captured SmartScanTM for environment monitoring. Changes in real-time temperature and humidity can be checked with plot charts, and if it is out of the designated range, the researcher is informed by alert pop-up.
Figure 8. Live monitoring camera. A live monitoring camera enables real-time observation of the inside of AE.
Conclusions
Advancements in AFM technology have revolutionized surface characterization across multiple disciplines. AFM's unique capabilities have driven academic research and become integral to various industrial processes. As technology evolves, AFM's role will continue to expand, highlighting its enduring significance in both scientific and industrial contexts. Park Systems' development of the FX200 reflects a steadfast commitment to supporting the next generation of research. With its automated probe exchange capability, the FX200 offers exceptional convenience, enhancing productivity for professionals while ensuring reliable performance and safety. Featuring state-of-the-art Park AFM technology and advanced automated functions, the FX200 sets a new benchmark for AFM in shared user facilities and industrial laboratories.
