Park nano-IR integrates nanoscale infrared (IR) spectroscopy with atomic force microscopy (AFM) to deliver advanced chemical and materials characterization. By incorporating the latest in infrared spectroscopy—photo-induced force microscopy (PiFM)—into the industry-leading Park AFM platform, this system offers unparalleled performance in nanoscale analysis.
Park nano-IR delivers spatial resolution beyond that of conventional IR spectroscopy and other nanoscale techniques while ensuring consistently high resolution and measurement accuracy throughout the analysis. By utilizing a non-contact method, it prevents sample damage and avoids tip contamination, allowing for reliable measurements. This capability brings molecular analysis into the realm of true nanoscale by providing both IR absorption spectra and chemical mapping with approximately down to 10 nm spatial resolution and monolayer sensitivity. The integration of sideband techniques enables the detection of subtle molecular bonding information, with depth-sensitive insights via direct drive and sideband bimodal detection methods.
Designed for efficiency, the FX series AFM systems feature automated probe mounting and IR laser alignment. This streamlined setup significantly reduces measurement preparation time, enhancing overall user convenience.
Park nano-IR offers an integrated approach to material characterization by simultaneously acquiring high-resolution topography, IR spectra, and chemical maps at specific wavenumbers, along with additional AFM-based measurements of mechanical, electrical, and thermal properties. This holistic capability is especially valuable in semiconductor research, where the system enables not only precise defect detection but also the nanoscale identification of material composition for thorough failure analysis and device characterization.
The PiFM approach utilizes a non-contact detection technique that surpasses traditional methods such as tapping PTIR (photothermal induced resonance) in spatial resolution, measurement reliability, and sample safety. With Park nano-IR, users can obtain high-resolution IR spectra and IR absorption images at the nanoscale, enabling detailed chemical analysis of complex materials. Moreover, the high-resolution IR spectra show excellent correlation with conventional FTIR (Fourier Transform Infrared) spectroscopy. Advanced detection methods—including direct drive and sideband bimodal techniques—allow for the extraction of valuable material information from varying depths.
Available on our FX200 IR, FX300 IR and FX300* systems, Park nano-IR provides:
*FX300: The nano-IR is available as an optional module addition along with industrial-specialized applications including long-range profiler, rotation stage and fan filter unit