Park Systems, the leading nanotechnology solutions partner of nanoscale measurements, would like to invite you to visit us at SemiconJapan 2010 (Booth# 5A-203), December7th-9th, 2011 at the Makuhari Messe in Chiba, Japan. Park Systems, in its continuing efforts to provide our customers with nanometrologysolutions for today’s challenges in device manufacturing, will be featuring a range ofautomated AFM products for in-line fab. Theexhibition will provide an excellent opportunity to learn about the XE-Wafer, our automated industrial AFM for in-line wafer inspection and metrology of 200 mm and 300 mm wafers, and the XE-3DM, our new 3D AFM for high resolution 3D metrology with patented tilted Z-scan system. The XE-3DM is a breakthrough in high resolution imaging of deep undercut structures and sidewalls. In addition, our True Non-Contact Mode enables non-destructive measurement of soft photoresist surface with high aspect ratio tips. Come and discover Park Systems’ fully automated AFM solutions for process monitoring and characterization of critical topographies!
Semicon Japan 2011