What is Scanning Capacitance Microscopy (SCM)?We will engage in a lecture exploring the finer details of the configuration of Park’s SCM, the principle of SCM, the theory of the SCM measurement based on the capacitance-voltage curve of material, and the applications of SCM in the analysis of dopant profile in semiconductors using a Park Systems AFM.Q&A session will be followed after the lecture contents. Interactive Demo Session for SCM:Lecture topics will be reinforced through demonstration Park Systems’ Scanning SCM mode on a Park Systems NX series AFM. A metal-oxide-semiconductor sample with different dopant type and dopant level will be used. AFM operator controls lock-in amplifier settings with emphasis on how to reveal dopant types and dopant level.