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LiquidCell MembraneFilter SrTiO3 EFM Mfm Laser ContactModeDot mfm_amplitude Blend SrO Polytetrafluoroethylene plastics HafniumDioxide Boron FastScan Yttria_stabilized_Zirconia MagneticPhase Dr.JurekSadowski CeNSE_IISc phase_change BiasMode MonoLayer WPlug bias_mode Al2O3 Chromium Fujian Butterfly ring shape margarine CancerCell Topography Ceramics LiNbO3 Deposition
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CMP test key
Scanning Conditions
- System : NX-Wafer
- Scan Mode: Non-contact
- Scan Rate : 1Hz for 100μm2 / 1.5Hz for 30μm2
- Scan Size : 100μm2, 30μm2
- Pixel Size : All 1024×512
- Cantilever : CMCL-AC240TS (k=2N/m, f=70kHz)