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  • Park

    SmartLithoTM


    The easiest operating software
    available for nanolithography
    and nanomanipulation

    smartscan-screen

Park SmartLitho™

Supported by Park SmartScan™ with an easy user interface for Nanolithography and Nanomanipulation

SmartScan Auto performs all the necessary operations for imaging and intelligently decides on the optimum image quality and scan speed, all autonomously. SmartScan Auto is made possible by Park’s proprietary enabling technologies. That saves you time, money, and makes for a better end result.

The easiest operating software available for nanolithography and nanomanipulation

Park SmartLitho, enabled by SmartScan is an AFM based platform that performs nanolithography and nanomanipulation on materials, electrical and electronics devices, nanotechnology and other areas of research.

Park SmartLitho software has a variety of lithography modes, supports both Vector mode and Raster mode and operates on the SmartScan platform, which has an easy user interface, and provides a stand-alone convenient drawing editor.

Brochures

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Park SmartLitho™ provides a stand-alone convenient drawing editor

[Christmas Ball Lithography on Si]


SmartLitho mode supported by Park SmartScan™

Design

PFM Quad

3D Image

[Taegeuk Mark Lithography on PZT]

 

Park SmartLitho