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    High vacuum AFM
    Ideal for failure analysis
    and sensitive materials research

Park NX-Hivac

High vacuum atomic force microscope
for failure analysis and ​atmosphere-sensitive materials research

Park NX-Hivac allows failure analysis engineers to improve the sensitivity and repeatability​ of their ​AFM ​measurements through a high vacuum ​environment. Because high vacuum ​measurement offers greater accuracy, better repeatability, and less tip and sample damage than ambient or dry N2 conditions, users can measure a wide​r​ range of signal response​ in various failure analysis applications​​, such as dopant concentration of Scanning Spreading Resistance Microscopy (SSRM).

Park NX-Hivac enables materials scientific research that requires ​high accuracy and high resolution measurements in a vacuum environment free from ox​ygen and other agents.



Performing Scanning Spreading Resistance Microscopy (SSRM) measurements under high-vacuum conditions can reduce the required tip-sample interaction force, which can significantly reduce damage to both the sample and the tip. This will extend the life of each tip, making scanning cheaper and more convenient, and can provide more accurate results by improving spatial resolution and signal to noise ratio. This makes high vacuum Scanning Spreading Resistance Microscopy (SSRM) measurements conducted with the NX-Hivac an excellent choice for failure analysis engineers looking to increase their throughput, reduce costs, and improve accuracy.


Park Hivac Manager

NX-Hivac auto vacuum control

High vacuum is controlled by Hivac Manager, pumping for the optimized vacuum condition and venting processes are logically and visually controlled by one-button clicking. Each process is visually monitored by color and schematic changes, you would not need to worry about the sequence of vacuum operation after a click on a button. Faster and easier vacuum control software brings ease of use AFM operation and better productivity.


Advanced automation features

The NX-Hivac features a range of tools that minimize the required input from the user. This means you can scan faster and increase your lab’s throughput.


StepScan Automation with Motorized stage

StepScan gives users the ability to program the device to image multiple regions quickly and easily. The NX-Hivac lets you scan a sample in just five steps: Scan, lift cantilever, move the motorized stage to a user defined coordinate, approach, and repeat. This boosts productivity enormously and reduces required user input to the absolute minimum.


Motorized laser alignment

Park’s motorized laser beam alignment lets the user seamlessly continue automated measurement routines without user input. With our advanced pre-aligned cantilever holder, the laser beam is focused on the cantilever upon tip exchange. The laser spot is then optimized along the X- and Y-axis by motorized positioning knobs.


Increasing accuracy and productivity

Although the NX-Hivac is the world’s most accurate high performance AFM, it is also one of the easiest to use and convenient AFMs for failure analysis applications. With Park NX-Hivac, you can increase your productivity and trust that your results are sound.


Closed-loop XY and Z Scanners

With two independent closed-loop XY and Z flexure scanners for the sample and probe tip, you can rest assured that your scans will be extremely accurate. The NX-Hivac offers flat and orthogonal XY scanning with a low residual bow, offering out of plane motion less than 1 nm over the entire scan range. The NX-Hivac also features a high speeds Z scanner with a 15 μm scan range and Z scanner non-linearity is less than 0.5%. This provides accurate 2D and 3D measurements with no need for software processing.


Low Noise XYZ Position Sensors

The NX-Hivac features Park AFM’s industry leading low noise Z detector that can accurately measure sample topography. In contrast the low noise XY closed loop scan minimizes the forward and backward scan gap to less than 0.15% of the scan range.

24-bit Digital Electronics


Minimize wasted time and maximize accuracy with the trademark NX Series electronics controller featured in the NX-Hivac. Our controller is an all digital, 24-bit high speed device that gives the user the ability to perform a wide range of scans including our True Non-Contact mode. With its low noise design and high speed processing unit, the controller is ideal for precise voltage and current measurement as well as nano scale imaging. The embedded electronics also feature digital signal processing, allowing users to easily analyze measurements and imaging.




XY scanner: 50 μm × 50 μm (100 μm x 100 μm optional)
Z scanner: 15 μm


Objective lens: 10×
5M pixel CCD

Sample Stage

XY stage travel: 22 mm x 22 mm
Sample size: 50 mm x 50 mm, up to 20 mm thickness


Inner vacuum chamber: 300 mm x 420 mm x 320 mm
Outer vacuum (including granite & pump): 800 mm x 950 mm x 730 mm


SmartScan: Park AFM operating software
XEI: AFM data analysis software
Hivac Manager: Auto vacuum control software


High Vacuum

Vacuum level: Typically less than 1 x 10-5 torr
Pumping speed: Reach to 10-5 torr within 5 min.


Integrated functions

4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method, optional)
Digital Q control

External signal access

20 embedded signal input/output ports
5 TTL outputs : EOF, EOL, EOP, Modulation, and AC bias


Park NX-Hivac | High vacuum AFM | Park Atomic Force Microscope