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    AFM Specifications

Park NX20 Specification 

Z scanner

AFM Head
Flexure guided high-force scanner
Scan range: 15 μm (optional 30 μm)

Flexure-guided structure driven by multiply-stacked piezoelectric stacks
Z scan range: 15 μm (optional 30 μm)


XY scanner

Dual-servo closed-loop feedback control for precise XY positioning
Scan range: 100 μm × 100 μm (optional 50 μm × 50 μm)



XY stage travel range: 150 mm (200 mm optional)
Z stage travel range: 25 mm
Focus stage travel range: 8 mm
Precision encoder for all axes (optional)



Direct on-axis vision of sample surface and cantilever
Field-of-view: 840 μm × 630 μm (with 10× objective lens)
CCD: 5 M pixel

Objective lens
10 x ultra-long working distance lens
20 x high-resolution, long working distance lens



Signal processing
ADC: 18 channels
24-bit ADCs for X, Y, and
Z scanner position sensor
DAC: 17 channels
20-bit DACs for X, Y, and Z scanner positioning

Integrated functions
4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method)
Digital Q control


Sample Mount

Sample size:
Sample size: 1 small sample (10 x 10 mm, 20 mm thickness) or up to 150 mm wafer (200 mm optional)
Vacuum grooves to hold wafer samples
Up to 16 small samples (10 mm x 10 mm, 20 mm thickness) (Optional Multi Sample Chuck)



Topography Imaging


Dielectric/Piezoelectric Properties

Piezoresponse Force Microscopy
PFM with High Voltage
Piezoresponse Spectroscopy

Electrical Properties

Conductive AFM (C-AFM)
I/V Spectroscopy
Kelvin Probe Force Microscopy (KPFM)
KPFM with High Voltage
Scanning Capacitance Microscopy (SCM)
Scanning Spreading-Resistance Microscopy (SSRM)
Scanning Tunneling Microscopy (STM)
Photo Current Mapping (PCM)
Current-Distance (I/d) Spectroscopy (with SICM)
Electrostatic Force Microscopy (EFM)

Mechanical Properties

PinPoint Nanomechanical
Force Modulation Microscopy (FMM)
Nanolithography with High Voltage
Lateral Force Microscopy (LFM)
Force Distance (F/d) Spectroscopy
Force Volume Imaging

Chemical Properties

Chemical Force Microscopy with Functionalized Tip

Thermal Properties

Scanning Thermal Microscopy (SThM)

Magnetic Properties

Magnetic Force Microscopy (MFM)




AFM system control and data acquisition software
Auto mode for quick setup and easy imaging
Manual mode for advanced use and finer scan control


AFM data analysis software
Stand-alone design—can install and analyze data away from AFM
Capable of producing 3D renders of acquired data



Universal Liquid Cell with Temperature Control
Temperature Controlled Stages
Electrochemistry Cell
Glove Box

Magnetic Field Generator
Multi Sample Chuck
Tilting Sample Chuck
Snap-in Sample Chuck


Park NX20 - Specifications | Park Atomic Force Microscope