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    AFM Specifications

Park NX10 Specifications

Z Scanner

AFM Head
Flexure guided high-force scanner
Scan range: 15 μm (optional 30 μm)

Flexure-guided structure driven by multiply-stacked piezoelectric stacks
Z scan range: 15 μm (optional 30 μm)


XY Scanner

Single module flexure XY-scanner with closed-loop control
Scan range: 50 μm × 50 μm (optional 10 μm × 10 μm or 100 μm × 100 μm)



Sample size:Open space up to 100 mm x 100 mm, thickness up to 20 mm
XY stage travel range:20 mm x 20 mm
Z stage travel range:15 mm



Direct on-axis vision of sample surface and cantilever
Field-of-view: 480 μm × 360 μm (with 10× objective lens)
CCD: 1.2 M pixel (default), 5 M pixel (optional; Field-of-view: 840 μm x 630 μm)
Objective lens
10 x ultra-long working distance lens
20 x high-resolution, long working distance lens




AFM system control and data acquisition software
Auto mode for quick setup and easy imaging
Manual mode for advanced use and finer scan control


AFM data analysis software
Stand-alone design—can install and analyze data away from AFM
Capable of producing 3D renders of acquired data



Signal processing

ADC : 18 channels
24-bit ADCs for X, Y, and Z scanner position sensor
DAC: 17 channels
20-bit DACs for X, Y, and Z scanner positioning
2 high-speed DAC channels
20-bit DACs for X, Y, and Z scanner positioning

Integrated functions

4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method)
Digital Q control



Topography Imaging

True Non-Contact

Dielectric/Piezoelectric Properties

Piezoresponse Force Microscopy (PFM)
PFM with High Voltage
Piezoresponse Spectroscopy

Electrical Properties

Conductive AFM (C-AFM)
I/V Spectroscopy
Kelvin Probe Force Microscopy (KPFM)
KPFM with High Voltage
Scanning Capacitance Microscopy (SCM)
Scanning Spreading-Resistance Microscopy (SSRM)
Scanning Tunneling Microscopy (STM)
Photo Current Mapping (PCM)
Current-Distance (I/d) Spectroscopy (with SICM)
Electrostatic Force Microscopy (EFM)

Mechanical Properties

PinPoint Nanomechanical Mode
Force Modulation Microscopy (FMM)
Nanolithography with High Voltage

Lateral Force Microscopy (LFM)
Force Distance (F/d) Spectroscopy
Force Volume Imaging


Magnetic Properties

Magnetic Force Microscopy (MFM)

Chemical Properties

Chemical Force Microscopy with Functionalized Tip

Thermal Properties

Scanning Thermal Microscopy (SThM)



Universal Liquid Cell with Temperature Control
Temperature Controlled Stages
Electrochemistry Cell
Glove Box
Magnetic Field Generator
Tilting Sample Chuck

Park-NX10 Dimensions 2Park-NX10 Dimensions 1

Park NX10 - Specifications | Park Atomic Force Microscope