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    NX10
    AFM Specifications

Park NX10 Specifications

Z Scanner

AFM Head
Flexure guided high-force scanner
Scan range: 15 μm (optional 30 μm)

SICM Head
Flexure-guided structure driven by multiply-stacked piezoelectric stacks
Z scan range: 15 μm (optional 30 μm)

 

XY Scanner

Single module flexure XY-scanner with closed-loop control
Scan range: 50 μm × 50 μm (optional 10 μm × 10 μm or 100 μm × 100 μm)

 

Stage

Sample size:Open space up to 100 mm x 100 mm, thickness up to 20 mm
XY stage travel range:20 mm x 20 mm
Z stage travel range:15 mm

 

Vision

Direct on-axis vision of sample surface and cantilever
Field-of-view: 480 μm × 360 μm (with 10× objective lens)
CCD: 1.2 M pixel (default), 5 M pixel (optional; Field-of-view: 840 μm x 630 μm)
Objective lens
10 x ultra-long working distance lens
20 x high-resolution, long working distance lens

 

Software

SmartScan™

AFM system control and data acquisition software
Auto mode for quick setup and easy imaging
Manual mode for advanced use and finer scan control

XEI

AFM data analysis software
Stand-alone design—can install and analyze data away from AFM
Capable of producing 3D renders of acquired data

 

Electronics

Signal processing

ADC : 18 channels
24-bit ADCs for X, Y, and Z scanner position sensor
DAC: 17 channels
20-bit DACs for X, Y, and Z scanner positioning
2 high-speed DAC channels
20-bit DACs for X, Y, and Z scanner positioning

Integrated functions

4 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method)
Digital Q control

 

Options/Modes

Topography Imaging

True Non-Contact
Contact
Tapping

Dielectric/Piezoelectric Properties

Piezoresponse Force Microscopy (PFM)
PFM with High Voltage
Piezoresponse Spectroscopy

Electrical Properties

Conductive AFM (C-AFM)
I/V Spectroscopy
Kelvin Probe Force Microscopy (KPFM)
KPFM with High Voltage
Scanning Capacitance Microscopy (SCM)
Scanning Spreading-Resistance Microscopy (SSRM)
Scanning Tunneling Microscopy (STM)
Photo Current Mapping (PCM)
Current-Distance (I/d) Spectroscopy (with SICM)
Electrostatic Force Microscopy (EFM)

Mechanical Properties

PinPoint Nanomechanical Mode
Force Modulation Microscopy (FMM)
Nanoindentation
Nanolithography
Nanolithography with High Voltage
Nanomanipulation

Lateral Force Microscopy (LFM)
Force Distance (F/d) Spectroscopy
Force Volume Imaging

 

Magnetic Properties

Magnetic Force Microscopy (MFM)

Chemical Properties

Chemical Force Microscopy with Functionalized Tip
EC-AFM

Thermal Properties

Scanning Thermal Microscopy (SThM)

 

Accessories

Universal Liquid Cell with Temperature Control
Temperature Controlled Stages
Electrochemistry Cell
Glove Box
Magnetic Field Generator
Tilting Sample Chuck

 
Park-NX10 Dimensions 2Park-NX10 Dimensions 1

Park NX10 - Specifications | Park Atomic Force Microscope