Sample Mounts
The sample mount allows you to place various types of sample for the AFM measurement. It provides easier means to fix and access the sample.
Multi Sample Chuck
Specifications
- Sample plate to load multiple small samples for automated sequential scanning
- Up to 16 samples of less than 10 mm × 10 mm, 20 mm thickness each
- Sample weight: less than 200 g (in total)
150-mm Vacuum Sample Chuck
Specifications
- Sample size: 2, 4, 6 inch wafers
- up to 10 × 10 mm of arbitrary shape, 20 mm thickness
- Sample weight: less than 500 g
Snap-In Sample Chuck
Specifications
- Sample chuck to place samples on a repeatable position
- Positioning repeatability: 5 µm in X and Y direction each
Non-magnetic Sample Holder
Specifications
- A sample holder to hold samples on top of the XY scanner using clips
- Recommended for magnetically sensitive samples and / or configuration
Cross-sectional Sample Holder
Specifications
- Sample holder to vertically mount a cross-sectioned sample
held by a metallic clip - Allowable sample thickness: 3 mm max.
Tilting Sample Chuck
Specifications
- Sample plate to tilt the sample for sidewall measurements
- Tilting angle: 10, 15, and 20°
- Sample size: 20 mm × 20 mm, 2 mm thickness
- Sample weight: less than 200 g