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Park FX200

The most advanced AFM for 200 mm samples

Introducing Park FX200, Park Systems' latest innovation in Atomic Force Microscopy tailored for 200 mm samples. Boasting an advanced mechanical structure that ensures a significantly lower noise floor, minimal thermal drift, and exceptional stability, the FX200 sets a new standard in precision and reliability. Its faster Z servo performance and improved high-power sample view enhance operational efficiency and imaging capabilities, while features like automatic probe recognition and probe exchange, laser beam alignment, and macro optics for full sample view simplify user experience and maximize productivity. With optical autofocus, navigation, and sequential measurements at multiple coordinates, coupled with automated AFM scan parameter settings, automated data analysis, the FX200 streamlines complex operations, making it the ideal choice for both research and industrial applications. Delivering superior performance and ease of use, Park FX200 stands poised to revolutionize nanoscale imaging and analysis, empowering scientists and engineers to achieve unprecedented insights and advancements in their fields.

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Enhanced AFM Core Technology

  • Lower noise floor and minimal thermal drift

    The improved mechanical structure reduces operational noise floor, thermal drift, and facilitates a more concentrated SLD beam spot, surpassing previous limits. This leads to higher measurement accuracy and high-resolution imaging.

    Lower noise floor and minimal thermal drift

  • Small laser spot size

    • Laser spot size is very small as SLD beam is focused through objective lens
    • 11 µm of SLD beam diameter enables more applicability of fast Imaging cantilevers

    Small laser spot size

  • Faster Z servo performance

    • Driven by a high-force piezoelectric stack and guided by a flexure structure
    • New FX AFM electronic controller provides faster Z servo performance with better accuracy

    Faster Z servo performance

The Most Accurate AFM Scanning Mode Ever

The True Non-contact™ Mode achieves unprecedented control over tip-sample distance at the sub-nanometer scale.
The Park FX200 has a faster and more accurate True Non-contact™ Mode than any other AFM on the market.

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Accurate and Reproducible Measurements for Better Productivity

The benefits and the superiority of non-contact mode atomic force microscopy is well established: no tip wear, no sample damage, maintenance of high resolution imaging, and high accuracy of AFM measurement. However, only Park has achieved what True Non-Contact™ mode with its flexure-based high force Z-scanner. In True Non-Contact™ mode, the tip-sample distance is successfully maintained at a few nanometers in the net attractive regime of inter-atomic force. The small amplitude of tip oscillation minimizes the tip-sample interaction, resulting in superb tip preservation and negligible sample modification.

Handles Wafers and Multiple Samples

It accommodates a variety of sample sizes, including up to 200 mm wafers, tailored for industrial needs.
The vacuum chuck can hold up to 16 coupon samples, enabling diverse experiments in one setup.

  • Full 200 mm wafer support

    Accommodates wafers up to 200 mm in size, essential for semiconductor manufacturing and materials science research. The vacuum chuck ensures stable positioning for high-resolution imaging and precise measurements, enhancing versatility and efficiency.

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  • Holds up to

    16 coupon-sized samples

    The vacuum chuck can hold up to 16 coupon-sized samples simultaneously, boosting productivity by allowing diverse experiments in one setup. This feature reduces downtime and maximizes efficiency, ideal for labs needing to analyze multiple samples quickly.

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Intelligent Automation

It automates essential tasks including probe recognition and exchange, laser alignment, and parameter tuning, thereby boosting efficiency. It features 16 probe slots for repetitive measurements and mode transitions, reducing downtime and improving efficiency.

The Probe Identification Camera reads the QR code imprinted on the chip carrier of a new probe, displaying all pertinent information about each tip, including type, model, application, and usage. This allows for quick selection of the best probe tip for each job, ensuring accuracy and efficiency.

With automated probe exchange, replace old probes easily and safely with full automation. Featuring 16 probe slots for repetitive measurements and mode transitions, it reduces downtime and improves efficiency through rapid, autonomous probe switching.

Automatic Beam Alignment positions the laser beam onto the proper location of a cantilever and further optimizes the spot’s position on the PSPD both vertically and laterally. It shifts the X, Y, and Z axis for clearer images, with no distortion, all autonomously at the click of a button.

Simplified Operation

Advanced Region of Interest (ROI) Zooming uses a large field-of-view sample camera to display the entire 200 mm wafer, simplifying analysis by enabling quick, precise positioning. This reduces the time needed to locate target areas, from broad survey scans to detailed magnifications. Additionally, the refined optical vision delivers exceptional clarity, resolving line widths under 1 µm.

It allows predefined coordinate settings on large samples, such as 200 mm wafers or samples on multi-sample chuck, for automated execution. It supports sequential measurements including topography and advanced modes, and streamlining workflows in research and industrial environments.

Next Generation AFM Controller for High-End Products

Park FX Controller is specifically designed to augment the performance of the Park FX Series. This significant development enables advanced Piezoresponse Force Microscopy (PFM) applications, such as Contact Resonance PFM (CR-PFM) and Dual-Frequency Resonance Tracking (DFRT-PFM), without the need for additional hardware, ensuring our customers can take full advantage of the latest advancements in atomic force microscopy.

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  • DFRT-PFM Without External Amplifiers
  • Enhanced Safety and Real-Time Environmental Monitoring
  • Direct Enablement of CR-PFM with Increased Tip Bias Modulation Bandwidth
  • Faster Ethernet Connectivity for Quick Data and Image Processing

Applications

Perfect for Diverse Applications