Failure Analysis: Defect Analysis
Defects on a blanket copper sample were characterized in True Non-contact mode. The scan revealed a peak-to-valley height difference of 20.1 nm, highlighting surface irregularities associated with defect formation.
Scanning Conditions
- System: NX20 300mm
- Sample: Blanket Copper
- Scan Mode: True Non-contact
- Scan Rate: 1 Hz
- Scan Size: 2 µm × 2 µm
- Pixel Size: 512 × 256 pixels
- Peak-to-valley: 20.1 nm
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