Meeting the Challenges in Analyzing State-of-the-art Semiconductor Devices Using Scanning Probe Microscopy
Speaker : Phil Kaszuba Affiliation : Global Foundries Region : US Year : 2018 Language : English Examine the progression of semiconductor devices, addressing the analysis challenges of state-of-the-art 14 nanometer FinFET structures using advanced scanning probe microscopy techniques. Obtain insights into carrier profiling, device failure analysis, and a case study outlining a silicon defect leading to a short-circuit in a 40 nanometer fin.
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