Speaker : Dr. James Vicary Affiliation : Nu Nano Ltd, United Kingdom Region : Europe Year : 2022 Language : English Knowledge of the size and shape of the probe tip is often required to extract quantitative data from scanning probe techniques. While individual probes can be characterised by the user, using electron microscopy or tip geometry estimation protocols, a far more efficient approach is for the probe manufacturer to take on this responsibility. NuNano has recently developed a wafer-scale automated SEM capability incorporating machine learning and computer vision techniques to acquire measurements of tip radius and aspect ratio of every probe we produce. This provides us with greater insight into our manufacturing processes, which is crucial for effective product development and optimisation. However, equally valuable is the availability of known tip geometries with single nanometre resolution to contribute to quantitative output from the images, force measurements and other data acquired using SPM.
Automated wafer-scale inspection of AFM probes to support quantitative nanoscale force measurements
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