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self_healing sputter NanoLithography PiezoelectricForceMicroscopy Chemical_Vapor_Deposition MESA structure Cell Bmp Varistor Thermal temp Ceramic blended polymers Writing LightEmission Force-distance piezoelectric force microscopy Phase phase_change Polyaniline TungstenThinFilmDeposition ElectroDeposition Jason Vac Polyethylene Sio2 ContactModeDot CVD TriGlycineSulphate AmplitudeModulation align Terrace 2d_materials SiliconOxide ring shape