Defect Review Imaging and Analysis for Large Sample
Park Systems의 NX20은 다루기 쉬운 디자인 과 자동화 인터페이스를 가지고 있기 때문에 사용자는 장비를 사용하거나 신입 엔지니어를 교육하는데 많은 시간과 에너지를 쓸 필요가 없습니다. 이것은 사용자가 더 큰 문제를 해결하는 것과 고객에게 좀더 정확한 분석 데이터를 제공할 수 있습니다.
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Park Systems의 NX20은 디바이스의 결함을 발견하고 독창적인 결과물을 개발하는 것을 좀더 쉽게 하는 고유의 특징들을 갖추고 있으며, 사용자가 NX20이 제공하는 고해상도 데이터로 프로젝트를 더욱 수월하게 해결 할 수 있게 도와줍니다. 또한 NX 20의 완전 비접촉 모드™ 는 팁을 날카롭고 수명을 길게 유지 시켜주기 때문에 장시간 고해상도 스캔이 가능하며 팁을 교체하는데 드는 시간과 비용을 절약 할 수 있습니다.
Park Systems의 NX20은 다루기 쉬운 디자인 과 자동화 인터페이스를 가지고 있기 때문에 사용자는 장비를 사용하거나 신입 엔지니어를 교육하는데 많은 시간과 에너지를 쓸 필요가 없습니다. 이것은 사용자가 더 큰 문제를 해결하는 것과 고객에게 좀더 정확한 분석 데이터를 제공할 수 있습니다.
The XY scanner consists of symmetrical 2-dimensional flexure and high-force piezoelectric stacks provides high orthogonal movement with minimal out-of-plane motion as well as high responsiveness essential for precise sample scanning in the nanometer scale.
Driven by a high-force piezoelectric stack and guided by a flexure structure, the standard Z scanner has a high resonant frequency of more than 9 kHz (typically 10.5 kHz), and Z-servo speed of more than 48 mm/sec tip velocity which enables accurate feedback. The maximum Z scan range can be extended from 15µm to 30µm with the optional long scan range Z scanner.
The industry leading low noise Z detector replaces the applied Z voltage as the topography signal. In addition, the low noise XY closed loop scan minimizes the forward and backward scan gap to be less than 0.15% of the scan range.
The encoders, used on all motorized stages, enable higher positioning repeatability for accurate sample positioning. The encoded XY stage travels in 1 µm resolution with 2 µm repeatability, and the encoded Z stage, in 0.1 μm resolution with 1 μm repeatability.
Using the motorized sample stage, Step-and-Scan enables user-programmable multiple region imaging. This automated feature increases productivity by minimizing user assistance during repetitive imaging processes.
The unique head design allows for an open side access to sample and tip. The maximum sample size one can place on the stage is either 150 mm diameter x 20 mm or 200 mm diameter x 20 mm depending on the travel range option chosen for the XY sample stage.
The AFM head quickly slides into place along a dovetail rail, automatically locking and connecting to control electronics with precise positioning. The Super Luminescence Diode (SLD) provides accurate imaging of reflective surfaces and enables precise pico-Newton force-distance measurements, without interference in visible spectrum experiments.
Custom designed objective lens with a 51 mm ultra long working distance and 0.21 NA offers 1.0 µm resolution and sharp on-axis optical views. The top-down direct view enables easy navigation to target areas. The EL20x objective lens features a 20 mm working distance, 0.42 NA, and 0.7 µm resolution for enhanced vision clarity. A larger CCD sensor and software-controlled LED light ensure a broad field of view and ample illumination for precise sample observation.
Advanced SPM modes are enabled by simply plugging an option module to the expansion slot. The modular design of the NX-series AFM allows option compatibility throughout its product line.
The Z stage and focus stage engage the cantilever with the sample surface while constantly maintaining a clear field of vision for the user. And because the focus stage is motorized and software controlled, it has the precision necessary for transparent samples and liquid cell applications.
The NX-series AFMs utilize a unified NX electronics controller, a 24-bit high-speed digital unit that enhances the accuracy and speed of Park’s True Non-Contact ModeTM. Its low noise and fast processing are perfect for nanoscale imaging and precise electrical measurements, while embedded digital signal processing enhances functionality and value for advanced research.