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Al2O3 dielectric trench Optical SmalScan Annealing Cross-section Silicon Heating MESA structure Alkane HighAspect DOE temp_control ElectrostaticForceMicroscopy LightEmission ScratchMode Techcomp Phenanthrene InLiquid MfmAmplitude ShenYang mechanical property Holes PetruPoni_Institute Mosfet thermal_property Alloy UTEM FrictionForce Lift Oxidation AtomicLayer India Epoxy PtfeMembrane