Park FX AFMs
Unprecedented Performance and Ease-of-Use Enabled by AFM Automation
Why Automate AFM?
Park FX AFMs combine high-performance imaging and advanced measurement capabilities with extensive automation,
simplifying workflows that are traditionally complex and user-dependent.
Key Features
Park FX AFMs automate critical steps from probe alignment and sample navigation to the setup of advanced electrical and nano-IR measurements.
Automatic Probe Exchange and Alignment
Park FX AFMs automate probe exchange and alignment for fast, consistent
setup. Pre-mounted probes are loaded into cassette-based automatic tip
exchangers, supporting up to 8 probes on FX40 and 16 on FX200.
QR-code identification and vision-guided cantilever and laser alignment automate the entire process, improving ease-of-use and enabling remote operations.
QR-code identification and vision-guided cantilever and laser alignment automate the entire process, improving ease-of-use and enabling remote operations.
Sample Loading & Alignment
Park FX AFMs enable fast, motorized sample navigation, which is especially useful for remote operation, multi-sample workflows, and large-substrate measurements.
A top-view camera generates an overview map for point-and-click positioning, while camera-to-stage calibration enables accurate navigation and site relocation. On Park FX200, a full-sample view camera covers an entire 200 mm wafer.
A top-view camera generates an overview map for point-and-click positioning, while camera-to-stage calibration enables accurate navigation and site relocation. On Park FX200, a full-sample view camera covers an entire 200 mm wafer.
Accurate Probe Landing
Park FX AFMs track cantilever dynamics across the full height range, enabling safe probe landing from distances greater than 10 mm without manual sample height input. This prevents crashes and enables reliable landing on samples of different thicknesses within a single automated recipe.
Seamless Mode Switching
Park FX AFMs automatically switch between conductive AFM, KPFM, and other electrical modes without manual hardware reconfiguration. Electrical pathways, modes, channels, bias, and tracking methods can be saved and switched automatically while maintaining the same sample position.
Correlative electrical characterization becomes faster and more reproducible, enabling richer datasets across single or multiple regions of interest.
Correlative electrical characterization becomes faster and more reproducible, enabling richer datasets across single or multiple regions of interest.
Heterodyne KPFM as an Example
Park FX AFMs simplify heterodyne KPFM with guided, automated setup. Automatic frequency sweep and lock-in phase tuning streamline key configuration steps, enabling users to move quickly from setup to surface potential and work function measurements.
Automation in Nano-IR Measurements
Park nano-IR spectrometers extend FX automation to nanoscale IR measurements. Automated IR beam alignment uses real-time PiFM feedback to identify the optimal beam position with minimal user intervention. On FX200 IR, a full-sample view camera and multi-point measurement further automate nanoscale chemical characterization.
Testimonials
AFM Automation in Practice
“We wanted to measure electric domains of a sample using Kelvin Probe Force
Microscopy, and then perform nanolithography on the same sample area. This
requires two different tips. It was only possible thanks to the automatic probe
exchange.”
Dr. Federico Stramaglia
Staff Researcher at ICFO Nanocharacterization Lab, Spain
Staff Researcher at ICFO Nanocharacterization Lab, Spain
“Features such as automatic probe exchange and alignment greatly simplify our
workflows. This is particularly beneficial for students and new users, but it is equally
important for experienced researchers, as it saves time and helps prevent user-
related errors.”
Rebeca Ribeiro
CNRS Researcher at Université Paris-Saclay, France
CNRS Researcher at Université Paris-Saclay, France
Explore Automated AFM Solutions
Explore each Park FX AFM platform to find the right solution for your application
