Park Systems, the leading nanotechnology solutions partner of nanoscale measurements, invite you to visit us at SEMICON WEST 2012 (Booth #1346), July 10th - 12th 2012 at the Moscone Center in San Francisco, CA USA. Park, in its continuing efforts to provide our customers with metrology characterization solutions for today’s challenges in device manufacturing, will be featuring a range of industrial AFM products for in-line inspection in wafer manufacturing. The capabilities of our featured systems range from critical dimension measurement to undercut and sidewall characterization. SEMICON West will provide an excellent opportunity to learn about the XE-Wafer, our automated industrial AFM for in-line wafer inspection and metrology of 200 and 300 mm wafers, and the XE-3DM, our new 3D AFM for high resolution 3D metrology with patented tilted Z-scan system. The XE-3DM is a breakthrough in high resolution imaging of deep undercut structures and sidewalls. In addition, our True Non-Contact Mode enables non-destructive measurement of soft photoresist surface with high aspect ratio tips. Come and discover Parks’ fully automated AFM solutions for process monitoring and characterization of critical topographies!
- 제품소개
- 연구ᆞ표면분석용 원자현미경
- Small Sample AFM
- Large Sample AFM
- Vacuum Environment AFM
- AFM Probes and Options
- AFM Modes and Techniques
- 인라인 계측용 원자현미경
- AFM for Wafer Fabs
- AFM for Flat Panel Display
- Photomask Repair
- Optical Profilometry
- Nano Infrared Spectroscopy
- Ellipsometry for Thin Film Characterization
- Imaging Spectroscopic Ellipsometry
- Referenced Spectroscopic Ellipsometry
- Brewster Angle Microscopy
- Ellipsometry Accessories
- Surface Inspection Metrology
- 응용기술
- 고객지원
- 이벤트
- 회사소개
- 러닝센터
- NANOacademy
- Lectures
- How AFM Works
- 전문가 코너
- Analyze Cells
- Programs
- Park AFM Scholarship
- 제품소개
- 연구ᆞ표면분석용 원자현미경
- 인라인 계측용 원자현미경
- Ellipsometry for Thin Film Characterization
- Active Vibration Isolation
- Software
- 응용기술
- 고객지원
- 이벤트
- 회사소개
- 러닝센터
- NANOacademy
- Programs
- Resources
- You are here:
- 홈
- 이벤트
- 유저미팅 & 전시회
- 전시회
- Semicon West 2012
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