サンプルマウント
サンプルマウントを使うことで、AFM測定のために様々な種類のサンプルを置くことができ、サンプルの固定やアクセスが容易になります。
Multi Sample Chuck
Specifications
- Sample plate to load multiple small samples for automated sequential scanning
- Up to 16 samples of less than 10 mm × 10 mm, 20 mm thickness each
- Sample weight: less than 200 g (in total)
150-mm Vacuum Sample Chuck
Specifications
- Sample size: 2, 4, 6 inch wafers
- up to 10 × 10 mm of arbitrary shape, 20 mm thickness
- Sample weight: less than 500 g
Snap-In Sample Chuck
Specifications
- Sample chuck to place samples on a repeatable position
- Positioning repeatability: 5 µm in X and Y direction each
Non-magnetic Sample Holder
Specifications
- A sample holder to hold samples on top of the XY scanner using clips
- Recommended for magnetically sensitive samples and / or configuration
Cross-sectional Sample Holder
Specifications
- Sample holder to vertically mount a cross-sectioned sample
held by a metallic clip - Allowable sample thickness: 3 mm max.
Tilting Sample Chuck
Specifications
- Sample plate to tilt the sample for sidewall measurements
- Tilting angle: 10, 15, and 20°
- Sample size: 20 mm × 20 mm, 2 mm thickness
- Sample weight: less than 200 g