Z スキャナー ヘッド

弊社は、Park AFMの精度を向上させるために、これまでにさまざまなZスキャナーーヘッドを開発してまいりました。

SLD for better cantilever deflection detection

Our heads use Super Luminescence Diode (SLD) to give the most accurate cantilever deflection detection available.

Independent Z-Scan range selection

Because our heads separate the XY scanner from the Z scanner, you have complete control over the Z scan range.

Standard NX AFM Head

The standard NX AFM head is a high speed Z scanner with 15 µm scan range. It is our default head for all of the NX-series AFMs.

Standard NX AFM Head

Specifications

  • Z scan range: 15 µm
  • Resonant frequency of Z-scanner: > 9 kHz
  • Detection type: Super-Luminescence Diode (830 nm)
  • Noise floor: < 0.05 nm (typically 0.03 nm)

Long Travel NX AFM Head

The long travel NX AFM head gives extended Z scan range capability to the NX series of AFMs.

Long Travel NX AFM Head

Specifications

  • Z scan range: 30 µm
  • Resonant frequency of Z-scanner: > 2.0 kHz
  • Detection type: Super-Luminescence Diode (830 nm)
  • Noise floor: < 0.05 nm (typically 0.03 nm)

SICM NX Head for NX10/NX12

The standard NX SICM head is a high force Z scanner with 15 µm scan range. It is optional head for NX10 and NX12 systems.

SICM NX Head for NX10/NX12

Specifications

  • Z scan range: 15 µm
    Includes a low-noise, high-precision current amplifier
    Current noise in buffer: ≤ 650 fA

SICM Long Travel Head for NX10/NX12

The long travel NX SICM head provides extended Z scan range capability to NX10 and NX12 systems.

SICM Long Travel Head for NX10/NX12

Specifications

  • Z scan range: 30 µm
    Includes a low-noise, high-precision current amplifier
    Current noise in buffer: ≤ 650 fA

Standard XE Head

Our standard XE head is the ideal for most uses and works with all standard and the advanced modes for XE-series AFMs.

Standard XE Head

Specifications

  • Z scan range: 12 µm
  • Resonant frequency of Z-scanner: > 5 kHz
  • Detection type: Super Luminescence Diode (830 nm) , standard
  • Noise floor: < 0.02 nm (typical), 0.05 nm (maximum)

XE Optical Head

The XE Optical Head lets you use the cantilever of the AFM for light amplification when combined with Raman spectroscopy (Raman is no longer available), enhancing the optical response of the sample. The XE Optical Head provides wide optical accessibility from top, bottom, and side to deliver the best possible beam. This option is compatible with all the options of XE-series AFM.

XE Optical Head

Specifications

  • Optical accessibility: top and side
  • Z scan range: 12 µm or 25 µm
  • Resonant frequency: 3 kHz (12 µm XE Head), 1.7 kHz (25 µm XE Head)
  • Detection type: Super Luminescence Diode (830 nm)
  • Noise floor: 0.03 nm (typical), 0.05 nm (maximum)

Long Travel XE AFM Head

Give your XE series AFM an extended scanning range with the 25 µm Z-scanner. This head is perfect for high aspect ratio samples such as optical lenses and MEMS device. The head is fully compatible with all basic and advanced modes and options.

Specifications

  • Z scan range: 25 µm
  • Resonant frequency: > 1.7 kHz
  • Detection type: Super Luminescence Diode (830 nm)
  • Noise floor: < 0.05 nm (typically 0.03 nm)