E-PROM
Semiconductors & Devices
An E-PROM device was analyzed using Scanning Capacitance Microscopy (SCM). The measurement reveals clear contrast in the SCM amplitude image corresponding to the programmed binary pattern, alongside the surface topography in the height channel.
Scanning Conditions
- System: NX7
- Scan Mode: Scanning Capacitance Microscopy (SCM), Channel: Height (left), SCM Amplitude (right)
- Scan Rate: 0.2 Hz
- Scan Size: 40 µm × 40 µm
- Pixel Size: 512 × 512 pixels
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