Stitched image of Chiplet
Stitched image of Chiplet was measured in True Non-contact mode to acquire the surface topography. Each image is made by stitching with four 100 µm × 100 µm images and the image shows each pattern at the corner of of Chiplet.
Scanning Conditions
- System: NX20
- Sample: Stitched image of Chiplet
- Scan Mode: True Non-contact™ mode
- Scan Rate: 0.5 Hz
- Scan Size: 200 µm × 200 µm (Stitching four 100 µm × 100 µm images)
- Pixel Size: 512 × 128 pixels
- Peak-to-valley: 75.9 nm
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