Cr/Au/Fe₃GeTe₂/Al Multi-layer Structure

ISE enables the precise localization and characterization of the buried Fe₃GeTe₂ layer within the complex Cr/Au/Fe₃GeTe₂/Al heterostructure.
By mapping the phase-sensitive Delta parameter, ISE’s microscopic Delta map can visualize the spatial distribution and homogeneity of the encapsulated 2D material with high contrast, overcoming the limitations of conventional optical microscopy which cannot penetrate the metal capping layer.
Measurement Conditions
- System: EP4
- AOI: 45°
- Wavelength: 400 nm
- Method: Delta & Psi, ISE
- Objective Lens: 5× Nikon
- Lateral Resolution: 4 μm
*Image contribution: Accurion
Application
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