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Display structures such as micro lenses and contact holes feature steep sidewalls and complex 3D geometries that require precise measurement of sidewall roughness (SWR) and sidewall angle (SWA) for process control and yield improvement.

NX-3DM acquires line profiles from multiple directions (left, right, and top) and merges them into a single 3D profile, enabling accurate, non-destructive measurement of steep and even undercut features with reliable dimensional and angle analysis.

Scan Conditions

- System: NX-3DM

- Scan Mode: Non-Contact

- Scan Size: 10 µm², 3 µm²

- Scan Rate: 0.02 Hz

- Pixels: 2048×128

- Cantilever: EBD2-R2-NCLR (k=45 N/m, f=190 kHz)