Micro LED
Scanning Conditions
- System: NX-Wafer
- Scan Mode: True Non-Contact™ Mode
- Scan Rate: 0.3 Hz, 1 Hz
- Scan Size: 100 µm×100 µm, 5 µm×5 µm
- Pixel Size: 1024×512, 512×256
- Cantilever: AC160TS (k=26 N/m, f=300 kHz)
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