Semiconductor process monitoring; CMP​


Scanning Conditions

- System: NX20​
- Scan Mode: True Non-Contact™ Mode
- Scan Rate: 0.5 Hz​​
- Scan Size: 80 μm×80 μm​​
- Pixel Size: 512×512​
- Cantilever: AC160TS (k=26N/m, f=300kHz)​

Application

Related Modes

True Non-Contact™ Mode

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