Semiconductor process monitoring; Exposure
Study on the dependence of exposure tools on sidewall roughness.
Scanning Conditions
- System: NX-3DM
- Scan Mode: True Non-Contact™ Mode
- Scan Rate: 0.2 Hz
- Scan Size: 50 µm×50 µm
- Pixel Size: 512×512
- Cantilever: AC160TS (k=26 N/m, f=300 kHz)
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