Beyond Conventional Ellipsometry: High-Resolution Mapping of Oxide Thin Film
SPEAKERS
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Dang Quang (Rocky) Nguyen
Senior Application Scientist, Park Systems Corp.
Dr. Dang Quang (Rocky) Nguyen is a Senior Application Scientist at Park Systems Corp. in Suwon, South Korea, with over four years of specialized experience in nanoscale characterization. He has been instrumental in implementing and optimizing advanced atomic force microscopy and imaging spectroscopic ellipsometry techniques. Rocky's work is focused on enhancing the precision of nanoscale measurements and resolving complex technical challenges to improve equipment performance and process reliability.
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SPEAKERS
-
- Dang Quang (Rocky) Nguyen
- Senior Application Scientist, Park Systems Corp.
Authors
This webinar introduces Imaging Spectroscopic Ellipsometry (ISE) for high-resolution characterization of oxide thin films across various sample architectures. ISE combines spatially resolved Ψ and Δ spectra with micrometer-scale lateral resolution and nanometer-scale sensitivity to film thickness. Through pixel-wise optical modeling, ISE enables quantitative mapping of film thickness and optical properties, helping identify local non-uniformity, thickness gradients, and process-induced variations.
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