イベント

Scanning Capacitance Microscopy (SCM) is an advanced imaging mode of Park AFM used to map various doping levels of non-uniformly doped semiconductor samples. It provides doping concentration information over the sample surface by measuring the capacitance change between tip and sample. This session will demonstrate how to acquire the doping profile for a sample by using Park Systems’ SCM module. The basic principle, instrumentation set-up, and data analysis will be covered.